EpiWorld expands SiC wafer capacity with new AIXTRON tool in Xiamen

EpiWorld International Co., Ltd has received an AIX G5 WW C system from AIXTRON for its cleanroom facilities in Xiamen, China, to expand production capacity for silicon carbide epitaxial wafers. Annual capacity will increase to 60,000 wafers in 2019, with a new 18,000 sqm facility designed for up to 400,000 wafers annually.

“With this new addition, our annual capacity will be increased to 60,000 wafers in 2019.”aixtron.com

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• aixtron.comEpiWorld accelerates Commercialization of SiC Devices ...Nov 7, 2019

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