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Shinko Electric Industries will build a new building at its Takadai plant in Nakano City to double production capacity of ceramic electrostatic chucks, a key component for semiconductor manufacturing equipment. Construction starts December 2021, with operations beginning in 2023.
“半導体製造装置の基幹部品であるセラミック静電チャックの生産能力も増強する為、高丘工場内(中野市)に新棟を建設し生産能力を現行比約2倍に増強する。”oikiai-plus.jp
Summarized from public sources; check the original articles before acting on it.