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TSMC plans to invest $120-130 billion in 2020 for 5nm EUV capacity, with Fab 18 Phase 1 starting production in March 2020 and Phases 2 and 3 completing by 2022, targeting over 1 million 5nm wafers annually.
“設備業者推估台積電2020年資本支出將上看120~130億美元,最主要投資項目是5奈米極紫外光(EUV)產能建置”chinatimes.com
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