Onto Innovation partners with Rigaku for semiconductor process control solutions

Onto Innovation announced a strategic collaboration with X-ray technology leader Rigaku Holdings Corporation to develop next-generation process control solutions for semiconductor manufacturing. The partnership integrates Onto Innovation's Ai Diffract analysis software with Rigaku's CD-SAXS platforms, with systems already delivered for advanced V-NAND and DRAM metrology.

“Onto Innovation is actively collaborating with Rigaku to develop X‑ray solutions, integrating Onto Innovation’s leading Ai Diffract™ analysis software with Rigaku’s critical dimension small‑angle X‑ray scattering (CD‑SAXS) platforms.”investors.ontoinnovation.com

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• investors.ontoinnovation.comOnto Innovation - Onto Innovation Announces Strategic Partnership With Leading X-Ray Provider Rigaku To Advance Next-Generation Process Control SolutionsApr 20, 2026

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