Onto Innovation to acquire Semilab International's materials analysis business

Onto Innovation has agreed to acquire the materials analysis business of Semilab International for approximately $545 million in cash and stock. The acquisition adds inline wafer contamination monitoring and materials interface characterization technologies.

“This acquisition aligns with Onto Innovation’s strategy to excel in high-growth, high-margin segments of the semiconductor value chain.”investors.ontoinnovation.com

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• investors.ontoinnovation.comOnto Innovation - Onto Innovation Announces Agreement to Acquire Semilab International’s Materials Analysis BusinessJun 30, 2025

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