ADEKA to boost photoacid generator capacity at Chiba plant for EUV photoresists

ADEKA is investing 2.7 billion yen to expand production capacity of photoacid generators for advanced photoresists at its Chiba plant. The expansion will more than double capacity, with commercial operation scheduled for fiscal year 2023.

“本投資ではEUV向け製品の提供を加速するべく、従来では対応することが難しい１ppb未満の低メタル管理を実現する最新の設備を導入します。”adeka.co.jp

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• adeka.co.jp千葉工場で最先端フォトレジスト向け光酸発生剤の生産能力を増強｜What's New｜ADEKAAug 1, 2021

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