ADEKA to build organometallic compounds plant for EUV lithography in Kashima, Japan

ADEKA is constructing a new plant for organometallic compounds used in next-generation EUV lithography (High-NA EUV) at its Kashima Chemicals Plant in Kamisu City, Ibaraki Prefecture, Japan. The plant will have space reserved for future expansion.

“ADEKA has decided to construct a new plant for organometallic compounds for MOR used of Next-Generation EUV Lithography (High-NA EUV) at Kashima Chemicals Plant.”adeka.co.jp

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• adeka.co.jpConstruction of a New Plant for Organometallic Compounds for MOR used of Next-Generation EUV Lithography｜What's New｜ADEKAOct 31, 2025

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