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EBARA Corporation built a fully automated 18,450 square metre factory in Fujisawa near Tokyo to produce dry vacuum pumps for semiconductor, flat screen, LED and solar cell manufacturing. The plant is designed to produce more than 20,000 units a year.
“The factory is designed to produce more than 20,000 units a year.”ebara-pm.eu
Summarized from public sources; check the original articles before acting on it.