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Anhui North Microelectronics Research Institute Group is expanding its 6-inch high-performance MEMS bulk silicon process line in Bengbu, China. The project, with a total investment of about 1 billion CNY, will add approximately 2,000 wafers per month of capacity, doubling the current output, and is expected to reach full production capacity by the end of 2023.
“6英寸高性能MEMS体硅工艺线扩产工程项目将于今年底形成达产能力。”m.bbnews.cn
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