University of Southampton awards JEOL (UK) contract for electron beam lithography system

The University of Southampton awarded JEOL (UK) Ltd a contract valued at £3,138,991 for a 200mm high-performance electron beam lithography system for the Southampton Nanofabrication Centre.

“The University is looking to procure a new 200mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre.”tenderroster.com

• 1 source
• tenderroster.comProvision of a 200mm High… Lithography System – contract awardJan 17, 2023

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