# Onto Innovation partners with Rigaku for semiconductor process control solutions

Onto Innovation announced a strategic collaboration with X-ray technology leader Rigaku Holdings Corporation to develop next-generation process control solutions for semiconductor manufacturing. The partnership integrates Onto Innovation's Ai Diffract analysis software with Rigaku's CD-SAXS platforms, with systems already delivered for advanced V-NAND and DRAM metrology.

- Type: Partnership
- Announced: 2026-04-20
- Status: announced
- Products: X-ray metrology systems, optical critical dimension metrology, process control software
- Sectors: [Semiconductors and Industrial Electronics](https://endata.com/sectors/semiconductors-electronics.md)

## Companies

- [Rigaku Corporation](https://endata.com/companies/40624.md) (partner)
- [Onto Innovation](https://endata.com/companies/59496.md) (partner)

## Sources

- [investors.ontoinnovation.com](https://investors.ontoinnovation.com/news/news-details/2026/Onto-Innovation-Announces-Strategic-Partnership-With-Leading-X-Ray-Provider-Rigaku-To-Advance-Next-Generation-Process-Control-Solutions/default.aspx), 2026-04-20: "Onto Innovation is actively collaborating with Rigaku to develop X‑ray solutions, integrating Onto Innovation’s leading Ai Diffract™ analysis software with Rigaku’s critical dimension small‑angle X‑ray scattering (CD‑SAXS) platforms."

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Data from Endata (https://endata.com/). Announcements are summarized from public sources and may be incomplete; check the linked originals.