# ADEKA to build organometallic compounds plant for EUV lithography in Kashima, Japan

ADEKA is constructing a new plant for organometallic compounds used in next-generation EUV lithography (High-NA EUV) at its Kashima Chemicals Plant in Kamisu City, Ibaraki Prefecture, Japan. The plant will have space reserved for future expansion.

- Type: New facility
- Announced: 2025-10-31
- Where: Kamisu City, Ibaraki Prefecture, Japan
- Status: announced
- Products: organometallic compounds for MOR (metal oxide resist) for EUV lithography
- Sectors: [Semiconductors and Industrial Electronics](https://endata.com/sectors/semiconductors-electronics.md), [Specialty Chemicals](https://endata.com/sectors/specialty-chemicals.md)

## Companies

- [ADEKA](https://endata.com/companies/56800.md)

## Sources

- [adeka.co.jp](https://www.adeka.co.jp/en/news/2025/10/251031mor-e.html), 2025-10-31: "ADEKA has decided to construct a new plant for organometallic compounds for MOR used of Next-Generation EUV Lithography (High-NA EUV) at Kashima Chemicals Plant."

---
Data from Endata (https://endata.com/). Announcements are summarized from public sources and may be incomplete; check the linked originals.